Browsing by Author "Ünal, Dudu Hatice"
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High-quality AlN growth: a detailed study on ammonia flow
Yolcu, Gamze; Koçak, Merve Nur; Ünal, Dudu Hatice; Altuntaş, İsmail; Demir, İlkay (25.01.2023)High crystalline and optical quality aluminum nitride (AlN) films with thin thickness have been grown on Al2O3 by MOVPE (metal-organic vapor phase epitaxy) and the NH3 flow rate has been changed to improve the morphology and ...