dc.contributor.author | Ebru Tüzemen Şenadım | |
dc.contributor.author | Hülya Şahin | |
dc.contributor.author | Kamuran Kara | |
dc.contributor.author | Sezai Elagöz | |
dc.contributor.author | Ramazan Esen | |
dc.date.accessioned | 23.07.201910:49:13 | |
dc.date.accessioned | 2019-07-23T16:32:43Z | |
dc.date.available | 23.07.201910:49:13 | |
dc.date.available | 2019-07-23T16:32:43Z | |
dc.date.issued | 2014 | |
dc.identifier.issn | 1300-0101 | |
dc.identifier.uri | http://www.trdizin.gov.tr/publication/paper/detail/TVRZek1qQTBOQT09 | |
dc.identifier.uri | https://hdl.handle.net/20.500.12418/2592 | |
dc.description.abstract | A ZnO:Al (10%) thin film was prepared on GaAs(100) substrate by using a pulsed filtered cathodic vacuum arc deposition (PFCVAD) system. The ZnO:Al thin film was thermally annealed for 1 h at 2 different temperatures in air. The film structure was investigated as a function of annealing temperature by X-ray diffraction (XRD). ZnO:Al ◦ film annealed at 500 C by PFCVAD method resulted in an amorphous film. However, after annealing ZnO:Al film at ◦ ◦ ◦600 C, it showed (100) and (002) peaks at around 32 and 34 , respectively. The chemical state of ZnO:Al (AZO) film on GaAs substrate was investigated by using X-ray photoelectron spectroscopy (XPS). The dependence of optical properties on annealing was investigated by using a UV-VIS-NIR spectrophotometer. We also obtained the energy gap of ZnO:Al thin film by diffused reflectance spectra using the Kubelka–Munk function. | en_US |
dc.description.abstract | A ZnO:Al (10%) thin film was prepared on GaAs(100) substrate by using a pulsed filtered cathodic vacuum arc deposition (PFCVAD) system. The ZnO:Al thin film was thermally annealed for 1 h at 2 different temperatures in air. The film structure was investigated as a function of annealing temperature by X-ray diffraction (XRD). ZnO:Al ◦ film annealed at 500 C by PFCVAD method resulted in an amorphous film. However, after annealing ZnO:Al film at ◦ ◦ ◦600 C, it showed (100) and (002) peaks at around 32 and 34 , respectively. The chemical state of ZnO:Al (AZO) film on GaAs substrate was investigated by using X-ray photoelectron spectroscopy (XPS). The dependence of optical properties on annealing was investigated by using a UV-VIS-NIR spectrophotometer. We also obtained the energy gap of ZnO:Al thin film by diffused reflectance spectra using the Kubelka–Munk function. | en_US |
dc.language.iso | eng | en_US |
dc.rights | info:eu-repo/semantics/openAccess | en_US |
dc.subject | Fizik | en_US |
dc.subject | Uygulamalı | en_US |
dc.title | XRD, XPS, and optical characterizations of Al-doped ZnO film grown on GaAs substrate | en_US |
dc.type | article | en_US |
dc.relation.journal | Turkish Journal of Physics | en_US |
dc.contributor.department | Sivas Cumhuriyet Üniversitesi | en_US |
dc.identifier.volume | 38 | en_US |
dc.identifier.issue | 1 | en_US |
dc.identifier.endpage | 117 | en_US |
dc.identifier.startpage | 111 | en_US |
dc.relation.publicationcategory | Makale - Ulusal Hakemli Dergi - Kurum Öğretim Elemanı | en_US] |