Browsing Makale Koleksiyonu by Department "Middle E Tech Univ, Dept Chem Engn, TR-06531 Ankara, Turkey -- Cumhuriyet Univ, Dept Chem Engn, Sivas, Turkey"
Now showing items 1-1 of 1
-
Synthesis and characterization of boron carbide films by plasma-enhanced chemical vapor deposition
(TAYLOR & FRANCIS INC, 2003)The plasma-enhanced chemical vapor deposition of boron carbide was investigated on quartz glass and alumina substrates from a gas mixture of BCl3, H-2, and CH4 in an inductively coupled plasma (ICP) medium produced by a ...