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Gallium oxide films deposition by RF magnetron sputtering; a detailed analysis on the effects of deposition pressure and sputtering power and annealing
Mobtakeri, Soheil; Akaltun, Yunus; Özer, Ali; Kılıç, Merhan; Şenadım Tüzemen, Ebru; Gür, Emre (2021)In this study, gallium oxide (Ga2O3) thin films were deposited on sapphire and n-Si substrates using Ga2O3 target by radio frequency magnetron sputtering (RFMS) at substrate temperature of 300 ◦C at variable RF power ...