dc.contributor.author | Demir, Ilkay | |
dc.contributor.author | Elagoz, Sezai | |
dc.date.accessioned | 2019-07-27T12:10:23Z | |
dc.date.accessioned | 2019-07-28T09:46:13Z | |
dc.date.available | 2019-07-27T12:10:23Z | |
dc.date.available | 2019-07-28T09:46:13Z | |
dc.date.issued | 2016 | |
dc.identifier.issn | 2147-1762 | |
dc.identifier.uri | https://hdl.handle.net/20.500.12418/7484 | |
dc.description | WOS: 000393128900024 | en_US |
dc.description.abstract | In this study, we report the growth studies of InGaAs/InAlAs superlattices (SLs) with thin layer thicknesses which will be used for quantum cascade laser (QCL) structures, grown by Metal Organic Chemical Vapor Deposition (MOCVD) technique. We utilize high resolution X-ray diffraction (HRXRD) to determine the single layer thickness and period thicknesses of SLs. Measurement results show that by establishing very low growth rates (similar to 0,1 nm/s), the single thin layers and SLs can be grown well by MOCVD in a controllable and repeatable way with high crystalline and interface quality. | en_US |
dc.description.sponsorship | Republic of Turkey, Ministry of Science, Industry and Technology-SANTEZ program [0573.STZ.2013-2]; TUBITAK [BIDEB-2211] | en_US |
dc.description.sponsorship | This study was partially supported by Republic of Turkey, Ministry of Science, Industry and Technology-SANTEZ program under grant number 0573.STZ.2013-2. Ilkay Demir acknowledges the support through TUBITAK PhD Program fellowship BIDEB-2211 Grant | en_US |
dc.language.iso | eng | en_US |
dc.publisher | GAZI UNIV | en_US |
dc.rights | info:eu-repo/semantics/closedAccess | en_US |
dc.subject | Superlattice | en_US |
dc.subject | InGaAs | en_US |
dc.subject | InAlAs | en_US |
dc.subject | MOCVD | en_US |
dc.subject | X-ray diffraction | en_US |
dc.title | Growth of InGaAs/InAlAs superlattices by MOCVD and precise thickness determination via HRXRD | en_US |
dc.type | article | en_US |
dc.relation.journal | GAZI UNIVERSITY JOURNAL OF SCIENCE | en_US |
dc.contributor.department | [Elagoz, Sezai] Cumhuriyet Univ, Dept Nanotechnol Engn, Nanophoton Res & Applicat Ctr, TR-58140 Sivas, Turkey | en_US |
dc.identifier.volume | 29 | en_US |
dc.identifier.issue | 4 | en_US |
dc.identifier.endpage | 951 | en_US |
dc.identifier.startpage | 947 | en_US |
dc.relation.publicationcategory | Makale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı | en_US |