Browsing by Author "Merve Nur Koçak"
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Growth and characterization of PALE Si-doped AlN on sapphire substrate by MOVPE
Kağan Murat Pürlü; Merve Nur Koçak; Gamze Yolcu; İzel Pertikel; İsmail Altuntaş; İlkay Demir (16.01.2022)teristics of heteroepitaxial Metal-Organic Vapor Phase Epitaxy (MOVPE) grown AlN layers on sapphire substrates. Adjustment of growth kinetics is very important to control the doping. Therefore, pulsed atomic layer epitaxy ... -
In-situ and ex-situ face-to-face annealing of epitaxial AlN
Merve Nur Koçak; Kağan Murat Pürlü; İzel Pertikel; İsmail Altuntaş; İlkay Demir (26.06.2022)AlN films have been deposited on c-plane sapphire substrates by metalorganic-vapor-phase-epitaxy (MOVPE). The changes in the film structure have been investigated by applying different annealing processes which are exsitu ... -
In-situ thermal cleaning of the sapphire substrate and temperature effect on epitaxial AlN
Merve Nur Koçak; Gamze Yolcu; Sabit Horoz; İsmail Altuntaş; İlkay Demir (3.09.2022)The impact of thermal surface cleaning on epitaxial AlN thin films grown on sapphire is investigated in this study at various temperatures. The sapphire substrate is cleaned in a hydrogen environment. Structural, optical, ...