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Sandwich method to grow high quality AlN by MOCVD
(IOP PUBLISHING LTD, 2018)
We report pulsed atomic layer epitaxy growth of a very high crystalline quality, thick (similar to 2 mu m) and crack-free AlN material on c-plane sapphire substrates via a sandwich method using metal organic chemical vapor ...
Microstructural Evolution of MOVPE Grown GaN by the Carrier Gas
(PLEIADES PUBLISHING INC, 2018)
We report the effect of total carrier gas flow of GaN during both GaN nucleation layer and high temperature GaN growth steps on structural, optical, electrical and morphological properties. The formation of dislocations ...