Browsing Araştırma Çıktıları by Subject "nanopatterning"
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Direct growth of thick AlN layers on nanopatterned Si substrates by cantilever epitaxy
(WILEY-V C H VERLAG GMBH, 2017)AlN layers have been grown on 200 nm period of nano-patterned Si (111) substrates by cantilever epitaxy and compared with AlN layers grown by maskless lateral epitaxial overgrowth (LEO) on micropatterned Si (111) substrates. ...