Browsing Sivas Cumhuriyet Üniversitesi Fen Fakültesi by Subject "Magnetron sputtering"
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Characterization of multilayer Al doping in ZnO
(2021)ZnO, ZnO/Al, Al/ZnO/Al, and ZnO/Al/ZnO samples were deposited on c-plane sapphire and Si substrates by radio frequency magnetron sputtering (RFMS) using ZnO target. In order to form doped ZnO:Al thin films, these grown ... -
Comprehensive growth and characterization study of GeOx/Si
(ELSEVIER, 2023)In this study, the reactive radio frequency magnetron sputtering (RFMS) method under varying thickness was used to deposit GeO x on Si substrate at room temperature. The effect of thickness on the structural and optical ...