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Comprehensive growth and characterization study of GeOx/Si
(ELSEVIER, 2023)
In this study, the reactive radio frequency magnetron sputtering (RFMS) method under varying thickness was used to deposit GeO x on Si substrate at room temperature. The effect of thickness on the structural and optical ...
Effect of substrate temperature on Raman study and optical properties of GeOx/ Si thin films
(Springer, 2023)
In this study, GeOx thin films were deposited onto Si substrates using the RF magnetron sputtering method. We looked at how the temperature of the substrate affected the Raman spectra and optical characteristics of GeOx ...
Experimental and theoretical insights on the structural and optical properties of GeOx thin films deposited via RF magnetron sputtering under varying oxygen percentage
(ELSEVIER, 2023)
In this study, GeOx films were produced by radio frequency magnetron sputtering (RFMS) under varying oxygen percentages. The structural and optical properties of films grown have been studied experimentally and theoretical ...