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Comprehensive growth and characterization study of GeOx/Si
Baghdedi, Dhouha; Hopoğlu, Hicret; Sarıtaş, Sevda; Altuntaş, İsmail; Abdelmoula, Najmeddine; Gür, Emre; ŞenadımTüzemen, Ebru (15.02.2023)In this study, the reactive radio frequency magnetron sputtering (RFMS) method under varying thickness was used to deposit GeO x on Si substrate at room temperature. The effect of thickness on the structural and optical ...