Browsing Nanoteknoloji Mühendisliği Bölümü by Author "Gamze Yolcu"
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Growth and characterization of PALE Si-doped AlN on sapphire substrate by MOVPE
Kağan Murat Pürlü; Merve Nur Koçak; Gamze Yolcu; İzel Pertikel; İsmail Altuntaş; İlkay Demir (16.01.2022)teristics of heteroepitaxial Metal-Organic Vapor Phase Epitaxy (MOVPE) grown AlN layers on sapphire substrates. Adjustment of growth kinetics is very important to control the doping. Therefore, pulsed atomic layer epitaxy ... -
In-situ thermal cleaning of the sapphire substrate and temperature effect on epitaxial AlN
Merve Nur Koçak; Gamze Yolcu; Sabit Horoz; İsmail Altuntaş; İlkay Demir (3.09.2022)The impact of thermal surface cleaning on epitaxial AlN thin films grown on sapphire is investigated in this study at various temperatures. The sapphire substrate is cleaned in a hydrogen environment. Structural, optical, ... -
The influence of TMGa pre-flow time and amount as surfactant on the structural and optical properties of AlN epilayer
Gamze Yolcu; İrem Şimşek; Reyhan kekül; İsmail Altuntaş; Sabit Horoz; İlkay Demir (3.06.2022)AIN is used as a template layer for deep UV (DUV) emitter and detector applications, because of its wide bandgap and high thermal conductivity. In this study, trimethylgallium (TMGa) source is used as surfactant to improve ...