Search
Now showing items 1-1 of 1
Close oxygen coupled low-pressure chemical vapor deposition growth of high quality β-Ga2O3 on sapphire
(2022)
We report on the close oxygen coupled low-pressure chemical vapor deposition (COC-LPCVD) hetero-epitaxial growth of atomically smooth (− 201) oriented β−
Ga2O3 on c-plane sapphire. Utilizing a dedicated line within the ...