Browsing Nanoteknoloji Mühendisliği Bölümü Makale Koleksiyonu by Author "İrem Şimşek"
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The influence of TMGa pre-flow time and amount as surfactant on the structural and optical properties of AlN epilayer
Gamze Yolcu; İrem Şimşek; Reyhan kekül; İsmail Altuntaş; Sabit Horoz; İlkay Demir (3.06.2022)AIN is used as a template layer for deep UV (DUV) emitter and detector applications, because of its wide bandgap and high thermal conductivity. In this study, trimethylgallium (TMGa) source is used as surfactant to improve ...