Browsing Nanoteknoloji Mühendisliği Bölümü Makale Koleksiyonu by Author "Sabit Horoz"
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In-situ thermal cleaning of the sapphire substrate and temperature effect on epitaxial AlN
Merve Nur Koçak; Gamze Yolcu; Sabit Horoz; İsmail Altuntaş; İlkay Demir (3.09.2022)The impact of thermal surface cleaning on epitaxial AlN thin films grown on sapphire is investigated in this study at various temperatures. The sapphire substrate is cleaned in a hydrogen environment. Structural, optical, ... -
The influence of TMGa pre-flow time and amount as surfactant on the structural and optical properties of AlN epilayer
Gamze Yolcu; İrem Şimşek; Reyhan kekül; İsmail Altuntaş; Sabit Horoz; İlkay Demir (3.06.2022)AIN is used as a template layer for deep UV (DUV) emitter and detector applications, because of its wide bandgap and high thermal conductivity. In this study, trimethylgallium (TMGa) source is used as surfactant to improve ...