Konu "Al2O3, ZnO, Magnetron sputtering, SEM, XRD, Optical properties" için Nanoteknoloji Mühendisliği Bölümü Makale Koleksiyonu listeleme
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ZnO/Al2O3 layered structures deposited by RF magnetron sputtering on glass: growth characteristics, optical properties, and microstructural analysis
(12.08.2021)In this study, Al2O3 thin films of different thicknesses (50 nm, 100 nm, 150 nm, 200 nm, and 250 nm) were, first, grown using RF magnetron sputtering technique on glass substrate at 30 °C temperature, with 120Wpower value. ...