Experimental and theoretical insights on the structural and optical properties of GeOx thin films deposited via RF magnetron sputtering under varying oxygen percentage

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dc.contributor.authorŞenadım Tüzemen, E.
dc.contributor.authorHopoğlu, H.
dc.contributor.authorSarıtaş, S.
dc.contributor.authorAydınoğlu, H.S.
dc.contributor.authorErtuğrul, M.
dc.contributor.authorMaslov, M.M.
dc.contributor.authorKaya, S.
dc.contributor.authorUngan F
dc.contributor.authorGür, E.
dc.date.accessioned2024-02-29T06:38:21Z
dc.date.available2024-02-29T06:38:21Z
dc.date.issued2023tr
dc.departmentFen Fakültesitr
dc.description.abstractIn this study, GeOx films were produced by radio frequency magnetron sputtering (RFMS) under varying oxygen percentages. The structural and optical properties of films grown have been studied experimentally and theoretical calculations have been presented using density functional theory (DFT). Considering the x-ray diffraction (XRD) analysis, Ge (111) peak was observed in the as-deposited film produced only at 2% oxygen percentage. In order to emerge crystal phases, all the amorphous films were annealed at 900 ◦C under atmospheric conditions. It was found that the intensity of the (101) peak increased as the oxygen percentage increased. At the same time, film grown at 2% oxygen percentage was annealed at different annealing temperatures sequentially at 850, 900, and 950 ◦C. As a result, the polycrystalline properties changed as the annealing temperature increased. It was found that the optical properties of the films grown are strongly dependent on the oxygen percentage. As the oxygen percentage has changed, the energy band gap has increased to the values 2.30, 2.31, 2.58, and 6.28 eV. There are Ge-O-Ge antisymmetric stretching peaks appeared at 861.51 cm 1, 949.94 cm 1 and symmetric stretching of hexagonal peaks at 516.34 cm 1, 546.29 cm 1, 581.95 cm 1. The energy band gap results of the density functional theory (DFT) calculations are in good agreement with the experimental observations.tr
dc.identifier.doi10.1016/j.physb.2022.414494en_US
dc.identifier.endpage9tr
dc.identifier.scopus2-s2.0-85142519435en_US
dc.identifier.scopusqualityN/A
dc.identifier.startpage1tr
dc.identifier.urihttps://hdl.handle.net/20.500.12418/14450
dc.identifier.volume650tr
dc.identifier.wosWOS:000907616200004en_US
dc.identifier.wosqualityQ3
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherELSEVIERtr
dc.relation.ispartofPhysica B: Condensed Matteren_US
dc.relation.publicationcategoryUluslararası Hakemli Dergide Makale - Kurum Öğretim Elemanıtr
dc.rightsinfo:eu-repo/semantics/closedAccesstr
dc.subjectGeOxtr
dc.subjectRadio frequency magnetron sputtering (RFMS)tr
dc.subjectXRDtr
dc.subjectOptical propertiestr
dc.subjectDensity functional theory (DFT) calculationstr
dc.titleExperimental and theoretical insights on the structural and optical properties of GeOx thin films deposited via RF magnetron sputtering under varying oxygen percentageen_US
dc.typeArticleen_US

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