Effect of substrate temperature on Raman study and optical properties of GeOx/ Si thin films

Basit Öğe Kaydı
dc.contributor.authorBaghdedi, Dhouha
dc.contributor.authorHopoğlu, Hicret
dc.contributor.authorDemir İlkay
dc.contributor.authorAltuntaş İsmail
dc.contributor.authorAbdelmoula, Najmeddine
dc.contributor.authorŞenadımTüzemen, Ebru
dc.date.accessioned2024-02-29T06:37:59Z
dc.date.available2024-02-29T06:37:59Z
dc.date.issued2023tr
dc.departmentFen Fakültesitr
dc.description.abstractIn this study, GeOx thin films were deposited onto Si substrates using the RF magnetron sputtering method. We looked at how the temperature of the substrate affected the Raman spectra and optical characteristics of GeOx thin films. X-ray diffraction was utilized to examine the crystal structure, and a scanning electron microscope was utilized to measure the thickness. In order to investigate the local structure and bonding characteristics, Raman spectroscopy was used. The refractive index, extinction coefficient, and dielectric parameters were calculated using spectroscopic ellipsometry for the 300–1100 nm spectral region. Refractive index and extinction coefficient spectral patterns were discovered by using a sample-air optical model to analyze the experimental ellipsometric data. Notably, a considerable rise in the refractive index was accompanied by a rise in substrate temperature.tr
dc.identifier.doi10.1007/s41779-023-00961-0en_US
dc.identifier.scopus2-s2.0-85174963890en_US
dc.identifier.scopusqualityN/A
dc.identifier.urihttps://hdl.handle.net/20.500.12418/14449
dc.identifier.wosWOS:001096180500001en_US
dc.identifier.wosqualityQ2
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherSpringertr
dc.relation.ispartofJournal of the Australian Ceramic Societyen_US
dc.relation.publicationcategoryUluslararası Hakemli Dergide Makale - Kurum Öğretim Elemanıtr
dc.rightsinfo:eu-repo/semantics/closedAccesstr
dc.subjectGeOxtr
dc.subjectRaman spectrometrytr
dc.subjectRFtr
dc.subjectOptical studytr
dc.subjectStructural studytr
dc.titleEffect of substrate temperature on Raman study and optical properties of GeOx/ Si thin filmsen_US
dc.typeArticleen_US

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